Publications

2020 Publications

  1. F. Doherty, H. Wang, M. Yang and B. R. Goldsmith, “Nanocluster and Single-atom Catalysts for Thermocatalytic Conversion of CO and CO2, Catal. Sci. Technol. 10, 5772 (2020). [Invited review] [doi:10.1039/D0CY01316A]
  2. S. Huang, S. Shim, S. K. Nam and M. J. Kushner, “Pattern Dependent Profile Distortion During Plasma Etching of High Aspect Ratio Features in SiO2, J. Vac. Sci. Technol. A 38, 023001 (2020). [doi:10.1116/1.5132800]
  3. J. Jiang and P. Bruggeman, “Spatially Resolved Absolute Densities of Reactive Species and Positive Ion Flux in He-O2 RF-driven Atmospheric Pressure Plasma Jet: Touching and Non-touching with Dielectric Substrate”, J. Phys. D: Appl. Phys. 53, 28LT01 (2020). [doi:10.1088/1361-6463/ab813d]
  4. C. Li, V. Godyak, T. Hofmann, K. Edinger and G. S. Oehrlein, “Electron Beam Injection from a Hollow Cathode Plasma into a Downstream Reactive Environment: Characterization of Secondary Plasma Production and Si3N4 and Si Etching”, J. Vac. Sci. & Technol. A 38, 033001 (2020). [doi:10.1116/1.5143537]
  5. C. Li, T. Hofmann, K. Edinger, V. Godyak and G. S. Oehrlein, “Etching of Si3N4 Induced by Electron Beam Plasma from Hollow Cathode Plasma in a Downstream Reactive Environment”, J. Vac. Sci. & Technol. B 38, 032208 (2020). [doi:10.1116/1.5143538]
  6. A. M. Lietz, E. V. Barnat, J. E. Foster and M. J. Kushner, “Ionization Wave Propagation in a He Plasma Jet in a Controlled Gas Environment”, J. Appl. Phys. 128, 083301 (2020). [Selected for cover of Journal of Applied Physics vol. 128, Issue 8, Aug. 2020] [doi:10.1063/5.0020264]
  7. S. Mohades, A. M. Lietz and M. J. Kushner, “Generation of Reactive Species in Water Film Dielectric Barrier Discharges Sustained in Argon, Helium, Air, Oxygen and Nitrogen”, J. Phys. D: Appl. Phys. 53, 435206 (2020). [doi:10.1088/1361-6463/aba21a]
  8. G. Nayak, M. Simeni Simeni, J. Rosato, N. Sadeghi and P.J. Bruggeman, “Characterization of an RF-driven Argon Plasma at Atmospheric Pressure Using Broadband Absorption and Optical Emission Spectroscopy”, J. Appl. Phys. 128, 243302 (2020). [Editor`s pick] [doi:10.1063/5.0035488]
  9. K. Orr, X. Yang, I. Gulko, and I. V. Adamovich, “Formation and Propagation of Ionization Waves During Ns Pulse Breakdown in Plane-to-Plane Geometry”, Plasma Sources Sci. Technol. 29, 125022 (2020). [doi:10.1088/1361-6595/aba989]
  10. C. Qu, S. J. Lanham, S. C. Shannon, S. K. Nam and M. J. Kushner, “Power Matching to Pulsed Inductively Coupled Plasmas”, J. Appl. Phys. 127, 133302 (2020). [doi:10.1063/5.0002522]
  11. C. Qu, S. K. Nam and M. J. Kushner, “Transients Using Low-high Pulsed Power in Inductively Coupled Plasmas”, Plasma Sources Sci. Technol. 29, 085006 (2020). [doi:10.1088/1361-6595/aba113]
  12. S. Zhang, Y. Li, A. Knoll and G. S. Oehrlein, “Mechanistic Aspects of Plasma-enhanced Catalytic Methane Decomposition by Time-resolved Operando Diffuse Reflectance Infrared Fourier Transform Spectroscopy”, J. Phys. D: Appl. Phys. 53, 215201 (2020). [doi:10.1088/1361-6463/ab795b]
  13. Y. Zhu, S. M. Starikovskaia, N. Yu. Babaeva and M. J. Kushner, “Scaling of Pulsed Nanosecond Capillary Plasmas at Different Specific Energy Deposition”, Plasma Sources Sci. Technol. 29, 125006 (2020). [doi:10.1088/1361-6595/abc413]

2021 Publications

  1. J. Jiang and P. J. Bruggeman, “Absolute Ion Density Measurements in the Afterglow of a Radiofrequency Atmospheric Pressure Plasma Jet”, J. Phys. D: Appl. Phys. 54, 15LT01 (2021). [doi:10.1088/1361-6463/abdc91]
  2. J. Jiang and P. J. Bruggeman, “Tuning Plasma Parameters to Control Reactive Species Fluxes to Substrates in the Context of Plasma Catalysis”, J. Phys. D: Appl. Phys. 54, 214005 (2021). [doi:10.1088/1361-6463/abe89a]
  3. J. Kruszelnicki, K. W. Engeling, J. E. Foster and M. J. Kushner, “Interactions between Atmospheric Pressure Plasmas and Metallic Catalyst Particles in Packed Bed Reactors”, J. Phys. D: Appl. Phys. 54, 104001 (2021). [doi:10.1088/1361-6463/abcc92]
  4. J. Kruszelnicki, R. Ma and M. J. Kushner, “Propagation of Atmospheric Pressure Plasmas Through Interconnected Pores in Dielectric Materials”, J. Appl. Phys. 129 143302 (2021). [doi:10.1063/5.0045706]
  5. W. Ning, J. Lai, J. Kruszelnicki, J. E. Foster, D. Dai and M. J. Kushner, “Propagation of Positive Discharges in an Air Bubble Having an Embedded Water Droplet”, Plasma Sources Sci. Technol. 30, 015005 (2021). [doi:10.1088/1361-6595/abc830]
  6. G. Parsey, A. M. Lietz and M. J. Kushner, “Guided Plasma Jets Directed onto Wet Surfaces: Angular Dependence and Control”, J. Phys. D: Appl. Phys. 54, 045206 (2021). [doi:10.1088/1361-6463/abbf1a]
  7. M. Simeni Simeni, Y. Zheng, E. V. Barnat and P. J. Bruggeman, “Townsend to Glow Discharge Transition for a Nanosecond Pulse Plasma in Helium: Space Charge Formation and Resulting Electric Field Dynamics”, Plasma Sources Sci. Technol. 30, 055004 (2021). [doi:10.1088/1361-6595/abf320]
  8. X. Wang, M. Wang, P. Biolsi and M. J. Kushner, “Scaling of Atomic Layer Etching of SiO2 in Fluorocarbon Plasmas: Transient Etching and Surface Roughness”, J. Vac. Sci. Technol. A 39, 033003 (2021). [doi:10.1116/6.0000941]
  9. S. Zhang and G. S. Oehrlein, “From Thermal Catalysis to Plasma Catalysis: a Review of Surface Processes and Their Characterizations”, J. Phys. D: Appl. Phys. 54, 213001 (2021). [doi:10.1088/1361-6463/abe572] [Topical review]